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| 005 | 20251117141532.0 | ||
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| 040 | _aUMP | ||
| 090 | _aTK7875 .B36 2005 | ||
| 100 | 1 | _aBao, Minhang | |
| 245 | 0 | 0 |
_aAnalysis and design principles of MEMS devices / _cby Mihang Bao |
| 260 |
_aAmsterdam: _bElsevier, _c2005 |
||
| 300 |
_axii, 312 p.: _bill.; _c25 cm. |
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| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | 0 | _aMicroelectromechanical systems |
| 999 |
_c19027 _d19033 |
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