| 000 | 00768nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | vtls000004482 | ||
| 003 | KUKTEM | ||
| 005 | 20251117142052.0 | ||
| 008 | 060614t2006 njua f 001 0|eng d | ||
| 020 | _a0131472860 | ||
| 039 | 9 |
_a201904301147 _bAUTHORITY _c201904301029 _dAUTHORITY _c201112131103 _dfauzi _c201107131659 _dVLOAD _y200606141118 _zVLOAD |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .L58 2006 | ||
| 100 | 1 | _aLiu, Chang | |
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu |
| 260 |
_aUpper Saddle River, NJ : _bPearson, _c2006 |
||
| 300 |
_axxii, 530 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 999 |
_aVIRTUA40 _c21787 _d21793 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*6500*9991 | ||