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| 003 | KUKTEM | ||
| 005 | 20251117142136.0 | ||
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| 040 | _aUMP | ||
| 090 | _aTK7876 .S36 2004 | ||
| 100 | _aSantos, Hector J. De Los | ||
| 245 | 0 | 0 |
_aIntroduction to microelectromechanical microwave systems / _c Hector J. De Los Santos |
| 250 | _a2nd ed. | ||
| 260 |
_aNorwood, MA: _bArtech House Publishers, _c 2004 |
||
| 300 |
_axiii, 221 p.: _b ill.; _c 24 cm. |
||
| 440 | 0 | _aMicroelectromechanical systems series | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | 0 | _aMicrowave devices |
| 650 | 0 | 0 | _aMicroelectromechanical systems |
| 999 |
_c23287 _d23293 |
||