000			01011nam a2200265 a 4500
001			vtls000007809
003			KUKTEM
005			20251117142211.0
008			060606t2005 nyu f 001 0 eng d
020			_a0071455566
020			_a9780071455565
039		9	_a201207041438 _basmadi _c201207041437 _dasmadi _c201107131728 _dVLOAD _c200908251605 _dnadia _y200606141135 _zVLOAD
040			_aUMP
090			_aTK7870.15 .G55 2005
100	1		_aGilleo, Ken
245	1	0	_aMEMS/MOEMS packaging : _bconcepts, designs, materials, and processes / _cKen Gilleo
260			_aNew York : _bMcGraw-Hill, _c2005
300			_axiii, 220 p. : _bill. ; _c24 cm.
490	0		_aMcGraw-Hill nanoscience and technology series
504			_aIncludes bibliographical references (p. 203-213) and index
650		0	_aMicroelectronic packaging
650		0	_aMicroelectromechanical systems
650		0	_aOptoelectronic devices
999			_aVIRTUA40 _c24439 _d24445
999			_aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*9992