000			00800nam a2200241 4500
001			vtls000007811
003			KUKTEM
005			20251117142212.0
008			060606t2004 xxu gr |0 1 0|eng |
020			_a0863413358
039		9	_a201107131728 _bVLOAD _c200908141059 _dVLOAD _c200908141031 _dVLOAD _c200908131537 _dVLOAD _y200606141135 _zVLOAD
040			_aUMP
090			_aTK7874 .M45 2004
245	0	0	_aMEMS packaging / _c edited by Tai-Ran Hsu
260			_aLondon: _b Institution of Electrical Engineers, _c 2004
300			_axxix, 275 p.: _b ill.; _c 26 cm.
440		0	_aEMIS processing series; 3
500			_aIncludes index
504			_aIncludes bibliographical references
650	0	0	_aMicroelectromechanical systems
650	0	0	_aMicroelectronic packaging
700	1	2	_aHsu, Tai-Ran
999			_c24464 _d24470