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| 001 | vtls000008007 | ||
| 003 | KUKTEM | ||
| 005 | 20251117142216.0 | ||
| 008 | 060606t2004 xxu gr |0 1 0|eng | | ||
| 020 | _a3540606580 | ||
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| 040 | _aUMP | ||
| 090 | _aTJ163 .F37 1997 | ||
| 100 | _aFatikow, S. ((Sergej)) 1960- | ||
| 245 | 0 | 0 |
_aMicrosystems technology and microrobotics / _c S. Fatikow, U. Rembold |
| 260 |
_aBerlin: New York: _b Springer, _c 1997 |
||
| 300 |
_axii, 408 p.: _b ill.; _c 24 cm. |
||
| 504 | _aIncludes bibliographical references (p. [366]-401) and index | ||
| 650 | 0 | 0 |
_aElectromechanical devices _xDesign and construction |
| 650 | 0 | 0 | _aMicrofabrication |
| 650 | 0 | 0 | _aRobotics |
| 700 | 1 | 2 | _aRembold, Ulrich |
| 999 |
_c24617 _d24623 |
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