| 000 | 00789nam a2200217 4500 | ||
|---|---|---|---|
| 001 | vtls000009501 | ||
| 003 | KUKTEM | ||
| 005 | 20251117142302.0 | ||
| 008 | 060606t2004 xxu gr |0 1 0|eng | | ||
| 020 | _a1580539017 | ||
| 039 | 9 |
_a201107131742 _bVLOAD _c200908141117 _dVLOAD _c200908141049 _dVLOAD _c200908131548 _dVLOAD _y200606141145 _zVLOAD |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .S42 2006 | ||
| 100 | 1 | _aSedky, Sherif | |
| 245 | 1 | 0 |
_aPost-processing techniques for integrated MEMS / _cSherif Sedky |
| 260 |
_aBoston: _bArtech House, _c2006 |
||
| 300 |
_axiv, 207p.: _bill.; _c24cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | 0 | _aMicroelectromechanical systems |
| 999 |
_aVIRTUA _c26167 _d26173 |
||
| 999 | _aVTLSSORT0080*0200*0900*1000*2450*2600*3000*5040*6500*9490*9991 | ||