| 000 | 00814nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000053711 | ||
| 003 | KUKTEM | ||
| 005 | 20251117142307.0 | ||
| 008 | 110603t2012 njua f b 001 0 eng d | ||
| 020 | _a9780132497367 (alk. paper) | ||
| 020 | _a0132497360 (alk. paper) | ||
| 039 | 9 |
_a201112131057 _bfauzi _c201107131624 _dVLOAD _y201106031134 _zsri |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .L58 2012 | ||
| 100 | 1 | _aLiu, Chang | |
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu |
| 250 | _a2nd ed. | ||
| 260 |
_aUpper Saddle River, N.J. : _bPrentice Hall, _cc2012 |
||
| 300 |
_axiv, 562 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 999 |
_aVIRTUA40 _c26342 _d26348 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2500*2600*3000*5040*6500*9991 | ||