| 000 | 00772nam a2200241 4500 | ||
|---|---|---|---|
| 001 | vtls000010892 | ||
| 003 | KUKTEM | ||
| 005 | 20251117142325.0 | ||
| 008 | 060606t2004 xxu gr |0 1 0|eng | | ||
| 020 | _a0521607671 | ||
| 039 | 9 |
_a201107131754 _bVLOAD _c200908141133 _dVLOAD _c200908141104 _dVLOAD _c200908131557 _dVLOAD _y200606141153 _zVLOAD |
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| 040 | _aUMP | ||
| 090 | _aTK7871.15.S55 E48 1998 | ||
| 100 | _aElwenspoek, M. | ||
| 245 | 0 | 0 |
_aSilicon micromachining / _c M. Elwenspoek and H. V. Jansen |
| 260 |
_aCambridge: _b Cambridge University Press, _c 1998 |
||
| 300 |
_axiii, 405 p.: _b ill; 25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | 0 | _aSilicon |
| 650 | 0 | 0 | _aMicromachining |
| 650 | 0 | 0 | _aEtching |
| 700 | 1 | 2 | _aJansen, H. V. |
| 999 |
_c26940 _d26946 |
||