000 00904nam a2200253 a 4500
001 vtls000010899
003 KUKTEM
005 20251117142325.0
008 060606t2004 enk f 001 0 eng d
020 _a086341334X
020 _a9780863413346
039 9 _a201207041507
_basmadi
_c201107131754
_dVLOAD
_c201006300921
_dFida
_c200908141133
_dVLOAD
_y200606141153
_zVLOAD
040 _aUMP
090 _aTK7871.85 .S56 2004
245 0 0 _aSIMOX /
_cedited by Maria J. Anc
260 _aLondon :
_bInstitution of Electrical Engineers,
_c2004
300 _axvi, 143 p. :
_bill. ;
_c26 cm.
490 1 _aProcessing series; no. 4
504 _aIncludes bibliographical references and index
650 0 _aSilicon-on-insulator technology
700 1 _aAnc, Maria J.
830 0 _aProcessing series; no. 4
999 _aVIRTUA40
_c26964
_d26970
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*7000*8300*9992