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| 090 | _aTS183 .M53 2006 | ||
| 245 | 0 | 0 |
_aMicro process engineering : _bfundamentals, devices, fabrication, and applications / _cvolume editor : Norbert Kockmann |
| 260 |
_aWeinheim : _bWiley-VCH , _cc2006 |
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| 300 |
_axxii, 507 p. : _bill. ; _c24 cm. |
||
| 440 |
_aAdvanced micro & nanosystems ; _v5 |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aProduction engineering | |
| 650 | 0 | _aMicrotechnology | |
| 700 | 1 | _aKockmann, Norbert | |
| 856 | 0 | _uhttp://www.loc.gov/catdir/enhancements/fy0645/2006296404-t.html | |
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