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040 _aUMP
090 _aTK7875 .L63 2006
100 1 _aLobontiu, Nicolae
245 1 0 _aMechanical design of microresonators :
_bmodeling and applications /
_cNicolae Lobontiu
260 _aNew York :
_cMcGraw-Hill,
_cc2006
300 _axiii, 342 p. :
_bill. ;
_c23 cm.
440 _aMcGraw-Hill nanoscience and technology series
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
_xDesign and construction
650 0 _aElectric resonators
_xDesign and construction
650 0 _aVibrators
_xDesign and construction
650 0 _aDetectors
_xDesign and construction
856 0 _ahttp://www.loc.gov/catdir/enhancements/fy0625/2005051140-t.html
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