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| 005 | 20251117144154.0 | ||
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_a201107131843 _bVLOAD _c200908141237 _dVLOAD _c200908141210 _dVLOAD _c200908131638 _dVLOAD _y200610051002 _zkam |
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| 090 | _aTK7875 .L97 2002 | ||
| 100 | 1 | _aLyshevski, Sergey Edward | |
| 245 | 1 | 0 |
_aMEMS and NEMS : _bsystems, devices, and structures / _cSergey Edward Lyshevski |
| 260 |
_aBoca Raton : _bCRC Press, _c2002 |
||
| 300 |
_a461 p. : _bill. ; _c24 cm |
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| 440 | 0 | _aNano- and microscience, engineering, technology, and medicine series | |
| 650 | 0 | _aMicroelectromechanical systems | |
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_aVIRTUA40 _c30827 _d30833 |
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