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| 090 | _aTK153 .A45 2005 | ||
| 100 | 1 | _aAllen, James J. | |
| 245 | 1 | 0 |
_aMicro electro mechanical system design / _cJames J. Allen |
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_aBoca Raton : _bTaylor & Francis, _c2005 |
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_a465 p. : _bill. ; _c23 cm. |
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| 440 | 0 | _aMechanical engineering | |
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_aMicroelectromechanical systems _xDesign and construction |
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| 650 | 0 | _aEngineering design | |
| 856 | 4 | 2 | _ahttp://www.loc.gov/catdir/enhancements/fy0648/2005041771-d.html |
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