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040 _aUMP
090 _aTK153 .A45 2005
100 1 _aAllen, James J.
245 1 0 _aMicro electro mechanical system design /
_cJames J. Allen
260 _aBoca Raton :
_bTaylor & Francis,
_c2005
300 _a465 p. :
_bill. ;
_c23 cm.
440 0 _aMechanical engineering
650 0 _aMicroelectromechanical systems
_xDesign and construction
650 0 _aEngineering design
856 4 2 _ahttp://www.loc.gov/catdir/enhancements/fy0648/2005041771-d.html
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