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| 100 | 1 | _aLiang, Hong | |
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_aTribology in chemical-mechanical planarization / _cHong Liang, David Craven |
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_aBoca Raton, FL : _bTaylor & Francis, _c2005 |
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_a185 p. : _bill. ; _c25 cm. |
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| 650 | 0 | _aGrinding and polishing | |
| 700 | 1 | _aCraven, David | |
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