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| 001 | vtls000016734 | ||
| 003 | KUKTEM | ||
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| 008 | 061130 000 0 eng d | ||
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| 090 | _aTK7875 .M463 2006 | ||
| 245 | 0 | 0 |
_aMEMS : _bdesign and fabrication / _cedited by Mohamed Gad-el-Hak |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bTaylor & Francis, _c2006 |
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_a(various pagings) : _bill. ; _c26 cm. |
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| 440 | _aMechanical engineering series | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aMicrofabrication | |
| 700 | 1 | _aGad-El-Hak, Mohamed | |
| 856 | 4 | 2 | _ahttp://www.loc.gov/catdir/toc/fy0702/2005050109.html |
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