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| 001 | vtls000016792 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144228.0 | ||
| 008 | 061205t nju e 001 0 eng d | ||
| 020 | _a0471784060 | ||
| 039 | 9 |
_a201107131850 _bVLOAD _c200908141246 _dVLOAD _c200908141218 _dVLOAD _c200908131643 _dVLOAD _y200612051605 _zdilla |
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| 040 | _aUMP | ||
| 090 | _aTK 7871.85 .M39 2006 | ||
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 |
_aFundamentals of semiconductor manufacturing and process control / _cGary S. May, Costas J. Spanos. |
|
| 260 |
_aHoboken, N.J. : _bWiley-Interscience, _c2006. |
||
| 300 |
_a463 p. : _bill. ; _c25 cm. |
||
| 650 | 0 |
_aSemiconductors _xDesign and construction |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 650 | 0 |
_aProcess control _xStatistical methods |
|
| 700 | 1 | _aSpanos, Costas J. | |
| 999 |
_aVIRTUA40 _c31997 _d32003 |
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| 999 | _aVTLSSORT0080*0200*0900*1000*2450*2600*3000*6500*6501*6502*7000*9991 | ||