000 00815nam a2200229 a 4500
001 vtls000017398
003 KUKTEM
005 20251117144231.0
008 070115 000 0 eng d
020 _a0863413528
039 9 _a201107131855
_bVLOAD
_c200908141252
_dVLOAD
_c200908141225
_dVLOAD
_c200908131647
_dVLOAD
_y200701151550
_zkam
040 _aUMP
090 _aTK7871.15.S54 S55 2004
245 0 0 _aSilicide technology for integrated circuits /
_cedited by Lih J. Chen
260 _aLondon :
_bInstiyution of Electrical Engineers,
_c2004
300 _a279 p. :
_bill. ;
_c26 cm.
440 0 _aIEE processing series ;
_v5
650 0 _aSilicides
650 0 _aIntegrated circuits
_xMaterials
700 1 _aChen, Lih J.
999 _aVIRTUA40
_c32116
_d32122
999 _aVTLSSORT0080*0200*0900*2450*2600*3000*4400*6500*6501*7000*9991