| 000 | 00815nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | vtls000017398 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144231.0 | ||
| 008 | 070115 000 0 eng d | ||
| 020 | _a0863413528 | ||
| 039 | 9 |
_a201107131855 _bVLOAD _c200908141252 _dVLOAD _c200908141225 _dVLOAD _c200908131647 _dVLOAD _y200701151550 _zkam |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.15.S54 S55 2004 | ||
| 245 | 0 | 0 |
_aSilicide technology for integrated circuits / _cedited by Lih J. Chen |
| 260 |
_aLondon : _bInstiyution of Electrical Engineers, _c2004 |
||
| 300 |
_a279 p. : _bill. ; _c26 cm. |
||
| 440 | 0 |
_aIEE processing series ; _v5 |
|
| 650 | 0 | _aSilicides | |
| 650 | 0 |
_aIntegrated circuits _xMaterials |
|
| 700 | 1 | _aChen, Lih J. | |
| 999 |
_aVIRTUA40 _c32116 _d32122 |
||
| 999 | _aVTLSSORT0080*0200*0900*2450*2600*3000*4400*6500*6501*7000*9991 | ||