| 000 | 00870nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | vtls000017414 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144232.0 | ||
| 008 | 070116 000 0 eng d | ||
| 020 | _a0849335434 | ||
| 039 | 9 |
_a201107131855 _bVLOAD _c200908141252 _dVLOAD _c200908141225 _dVLOAD _c200908131647 _dVLOAD _y200701161032 _zkam |
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| 040 | _aUMP | ||
| 090 | _aTK7871.85 .S25 2006 | ||
| 245 | 0 | 0 |
_aScientific wet process technology for innovative LSI/FPD manufacturing / _cedited by Tadahiro Ohmi |
| 260 |
_aBoca Raton : _bTaylor & Francis, _c2006 |
||
| 300 |
_a386 p. : _bill. ; _c26 cm. |
||
| 650 | 0 |
_aSemiconductors _xDesign and construction |
|
| 650 | 0 |
_aSemiconductors _xCleaning |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 700 | 1 | _aOhmi, Tadahiro | |
| 999 |
_aVIRTUA40 _c32150 _d32156 |
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| 999 | _aVTLSSORT0080*0200*0900*2450*2600*3000*6500*6501*6502*7000*9991 | ||