000 00776nam a2200217 a 4500
001 vtls000017357
003 KUKTEM
005 20251117144241.0
008 070111 000 0 eng d
020 _a0824723058
039 9 _a201107131855
_bVLOAD
_c200908141252
_dVLOAD
_c200908141224
_dVLOAD
_c200908131646
_dVLOAD
_y200701111537
_zkam
040 _aUMP
090 _aTK7875 .B36 2006
100 1 _aBanks, Danny
245 1 0 _aMicroengineering, MEMs, and interfacing :
_ba practical training /
_cDanny Banks
260 _aBoca Raton :
_bTaylor & Francis,
_c2006
300 _a326 p. :
_bill. ;
_c24 cm.
440 0 _aMechanical engineering ;
_v199
650 0 _aMicroelectromechanical systems
999 _aVIRTUA40
_c32462
_d32468
999 _aVTLSSORT0080*0200*0900*1000*2450*2600*3000*4400*6500*9991