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_aMicrosystems technology : _bfabrication, test & reliability / edited by Jumana Boussey |
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_aSterling, VA : _bKogan Page Science, _c2003 |
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_a295 p. : _bill. ; _c25 cm. |
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| 650 | 0 | _aMicroelectromechanical systems | |
| 700 | 1 | _aBoussey, Jumana | |
| 856 | 4 | 2 | _ahttp://www.loc.gov/catdir/toc/ecip046/2003015993.html |
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