| 000 | 01031nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000018758 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144255.0 | ||
| 008 | 070316 000 0 eng d | ||
| 020 | _a0824724313 (hbk.) | ||
| 039 | 9 |
_a201107131906 _bVLOAD _c200908141307 _dVLOAD _c200908141239 _dVLOAD _c200908131656 _dVLOAD _y200703160936 _zfarina |
|
| 040 | _aUMP | ||
| 090 | _aTK7836 .M53 2006 | ||
| 245 | 0 | 0 |
_aMicrofabrication and nanomanufacturing / _cedited by Mark J. Jackson. |
| 260 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006 |
||
| 300 |
_a401 p. : _bill. ; _c27 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 700 | 1 | _aJackson, Mark J. | |
| 856 | 0 | _uhttp://www.loc.gov/catdir/enhancements/fy0703/2005049275-d.html | |
| 999 |
_aVIRTUA _c32907 _d32913 |
||
| 999 | _aVTLSSORT0080*0200*0900*2450*2600*3000*5040*6500*6501*6502*7000*8560*9991 | ||