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020 _a3527312080 (pt. 1)
020 _a3527314938 (pt. 2)
039 9 _a201204161650
_bida
_c201107131909
_dVLOAD
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_dVLOAD
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_y200702141044
_zfarina
040 _aUMP
090 _aQC176.8.M5 M53 2005
245 0 0 _aMicroengineering of metals and ceramics /
_cvolume editors, Detlef Löhe and Jürgen Haubelt
246 1 _aDesign, tooling and injection molding
246 1 _aSpecial replication techniques, automation, and properties
260 _aWeinheim :
_bWiley-VCH,
_c2005
300 _a2 v. :
_bill. ;
_c25 cm.
440 _aAdvanced micro & nanosystems
_vv. 3-4
504 _aIncludes bibliographical references and index
505 0 0 _apt. 1. Design, tooling and injection molding -- pt. 2. Special replication techniques, automation, and properties
650 0 _aMicromechanics
650 0 _aCeramic materials
_xMicrostructure
650 0 _aMetals
_xMicrostructure
650 0 _aMicrotechnology
650 0 _aInjection molding of ceramics
650 0 _aInjection molding of metals
700 1 _aLöhe, Detlef
700 1 _aHausselt, Jürgen
856 0 _uhttp://www.loc.gov/catdir/enhancements/fy0627/2005283916-t.html
999 _aVIRTUA
_c33512
_d33518
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