| 000 | 01061nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000019588 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144318.0 | ||
| 008 | 070423t2002 flua f 001 0 eng d | ||
| 020 | _a0849308267 | ||
| 039 | 9 |
_a201207030932 _bFida _c201107131913 _dVLOAD _c200908141318 _dVLOAD _c200908141250 _dVLOAD _y200704231517 _zsri |
|
| 040 | _aUMP | ||
| 090 | _aTK7836 .M33 2002 | ||
| 100 | 1 | _aMadou, Marc J. | |
| 245 | 1 | 0 |
_aFundamentals of microfabrication : _bthe science of miniaturization / _cMarc J. Madou |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bCRC Press, _cc2002 |
||
| 300 |
_a723 p. : _bill. ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 650 | 0 | _aMachining | |
| 650 | 0 | _aMicroelectronic packaging | |
| 650 | 0 | _aLasers | |
| 999 |
_aVIRTUA40 _c33726 _d33732 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2500*2600*3000*5040*6500*6501*6502*6503*6504*6505*9992 | ||