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| 040 | _aUMP | ||
| 090 | _aQC688 .S28 2005 | ||
| 100 | 1 | _aSantos, Héctor J. de los | |
| 245 | 1 | 0 |
_aPrinciples and applications of NanoMEMS physics / _cby Héctor J. De Los Santos |
| 260 |
_aDordrecht, The Netherlands : _bSpringer, _cc2005 |
||
| 300 |
_axv, 254 p. : _bill. ; _c25 cm. |
||
| 440 |
_aMicrosystems ; _v15 |
||
| 504 | _aIncludes bibliographical references (p. [241]-252) and index | ||
| 650 | 0 | _aQuantum electronics | |
| 650 | 0 | _aWave-particle duality | |
| 650 | 0 | _aNanotechnology | |
| 650 | 0 | _aMicroelectromechanical systems | |
| 856 | 0 | _uhttp://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html | |
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