000			01342nam a2200253 a 4500
001			vtls000021866
003			KUKTEM
005			20251117144357.0
008			071028s2007 ne f 001 0 eng|d
020			_a1402059485
020			_a9781402059483
039		9	_a201107131931 _bVLOAD _c200908141340 _dVLOAD _c200908141312 _dVLOAD _c200908131717 _dVLOAD _y200710281247 _zkam
040			_aUMP
090			_aTJ1191.5 .M53 2007
245	0	0	_aMicromanufacturing : _binternational research and development / _cby Kornel F. Ehmann ... [et al.]
260			_aDordrecht : _bSpringer, _c2007
300			_a362 p. : _bill. ; _c25 cm.
500			_aCover title: Micromanufacturing : international assessment of research and development
505			_aIntroduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.
650		0	_aMicrofabrication
650		0	_aMicromachining
700	1		_aEhmann, Kornel F.
999			_aVIRTUA40 _c35096 _d35102
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5000*5050*6500*6501*7000*9991