000 00856nam a2200241 a 4500
001 vtls000022169
003 KUKTEM
005 20251117144420.0
008 071109s2004 ne f 001 0 eng|d
020 _a1402029284
039 9 _a201107131938
_bVLOAD
_c200908141348
_dVLOAD
_c200908141320
_dVLOAD
_c200908131722
_dVLOAD
_y200711091534
_zkam
040 _aUMP
090 _aTK7872.D48 S63 2004
245 0 0 _aSmart sensors and MEMS /
_cedited by Sergey Y. Yurish and Maria Teresa S.R. Gomes
260 _aDordrecht :
_bKluwer Academic,
_c2004
300 _a480 p. :
_bill., ports. ;
_c25 cm.
650 0 _aDetectors
650 0 _aMicroelectromechanical systems
650 0 _aScanning systems
700 1 _aYurish, Sergey Y.
700 1 _aGomes, Teresa S. R.
999 _aVIRTUA40
_c35854
_d35860
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*6500*6501*6502*7000*7001*9991