| 000 | 00856nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000022169 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144420.0 | ||
| 008 | 071109s2004 ne f 001 0 eng|d | ||
| 020 | _a1402029284 | ||
| 039 | 9 |
_a201107131938 _bVLOAD _c200908141348 _dVLOAD _c200908141320 _dVLOAD _c200908131722 _dVLOAD _y200711091534 _zkam |
|
| 040 | _aUMP | ||
| 090 | _aTK7872.D48 S63 2004 | ||
| 245 | 0 | 0 |
_aSmart sensors and MEMS / _cedited by Sergey Y. Yurish and Maria Teresa S.R. Gomes |
| 260 |
_aDordrecht : _bKluwer Academic, _c2004 |
||
| 300 |
_a480 p. : _bill., ports. ; _c25 cm. |
||
| 650 | 0 | _aDetectors | |
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aScanning systems | |
| 700 | 1 | _aYurish, Sergey Y. | |
| 700 | 1 | _aGomes, Teresa S. R. | |
| 999 |
_aVIRTUA40 _c35854 _d35860 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*6500*6501*6502*7000*7001*9991 | ||