| 000 | 00863nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000022219 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144423.0 | ||
| 008 | 071112s2004 mau f 001 0 eng|d | ||
| 020 | _a1580535364 | ||
| 039 | 9 |
_a201107131938 _bVLOAD _c200908141349 _dVLOAD _c200908141321 _dVLOAD _c200908131722 _dVLOAD _y200711121210 _zkam |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .M53 2004 | ||
| 245 | 0 | 0 |
_aMEMS mechanical sensors / _cStephen Beeby ... [et al.] |
| 260 |
_aBoston : _bArtech House, _c2004 |
||
| 300 |
_a269 p. : _bill. ; _c26 cm. |
||
| 440 | 0 | _aMicroelectromechanical systems series | |
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aDetectors | |
| 700 | 1 | _aBeeby, Stephen | |
| 856 | 4 | 2 | _ahttp://www.loc.gov/catdir/toc/fy0611/2004046158.html |
| 999 |
_aVIRTUA40 _c35981 _d35987 |
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| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4400*6500*6501*7000*8560*9991 | ||