| 000 | 00930nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000022817 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144439.0 | ||
| 008 | 071205t2007 gw f 001 0 eng|d | ||
| 020 | _a9783540695615 | ||
| 039 | 9 |
_a201107131942 _bVLOAD _c200908141353 _dVLOAD _c200908141325 _dVLOAD _c200908131725 _dVLOAD _y200712051222 _zfarina |
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| 040 | _aUMP | ||
| 090 | _aTK7875 .C64 2007 | ||
| 245 | 1 | 0 |
_aCMOS hotplate chemical microsensors / _cM. Graf ... [et al.] |
| 260 |
_aBerlin ; _aNew York : _bSpringer, _cc2007 |
||
| 300 |
_axii, 125 p. : _bill. (some col.) ; _c24 cm. |
||
| 440 | 0 | _aMicrotechnology and MEMS | |
| 504 | _aIncludes bibliographical references (p. 113-121) and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 650 | 0 | _aMicrofabrication | |
| 700 | 1 |
_aGraf, M. _q(Markus) |
|
| 999 |
_aVIRTUA40 _c36524 _d36530 |
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| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4400*5040*6500*6501*7000*9991 | ||