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008 071205t2007 gw f 001 0 eng|d
020 _a9783540695615
039 9 _a201107131942
_bVLOAD
_c200908141353
_dVLOAD
_c200908141325
_dVLOAD
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_dVLOAD
_y200712051222
_zfarina
040 _aUMP
090 _aTK7875 .C64 2007
245 1 0 _aCMOS hotplate chemical microsensors /
_cM. Graf ... [et al.]
260 _aBerlin ;
_aNew York :
_bSpringer,
_cc2007
300 _axii, 125 p. :
_bill. (some col.) ;
_c24 cm.
440 0 _aMicrotechnology and MEMS
504 _aIncludes bibliographical references (p. 113-121) and index
650 0 _aMicroelectromechanical systems
_xDesign and construction
650 0 _aMicrofabrication
700 1 _aGraf, M.
_q(Markus)
999 _aVIRTUA40
_c36524
_d36530
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4400*5040*6500*6501*7000*9991