| 000 | 00790nam a2200229 4500 | ||
|---|---|---|---|
| 001 | vtls000079990 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144526.0 | ||
| 008 | 140605t2014 ci a f 000 0 eng d | ||
| 020 | _a9789535110859 | ||
| 039 | 9 |
_a201412010951 _bariffin _y201406051338 _znadia |
|
| 040 | _aUMP | ||
| 090 | _aTJ1185 .A38 2014 | ||
| 245 | 0 | 0 |
_aAdvances in micro/nano electromechanical systems and fabrication technologies / _cedited by Kenichi Takahata |
| 260 |
_aRijeka, Croatia : _bINTECH, _c2014 |
||
| 300 |
_avi, 226 p. : _bill. ; _c23 cm. |
||
| 504 | _aIncludes bibliographical references | ||
| 650 | 0 | _aFabrication | |
| 650 | 0 | _aManufacturing processes | |
| 700 | 1 | _aTakahata, Kenichi | |
| 999 |
_aVIRTUA4 _c38097 _d38103 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*7000*9992 | ||