000			01911nam a2200373 a 4500
001			vtls000060037
003			KUKTEM
005			20251117144532.0
008			120522t2010 paua f b 101 0 eng d
020			_a9781605112183
020			_a1605112186
039		9	_a201710021127 _bAUTHORITY _c201209051557 _dfauzi _y201205221542 _zsafura
040			_aUMP
090			_aTK7871.85 .A38 2010
111	2		_aAdvanced Metallization Conference
245	1	0	_aAdvanced Metallization Conference 2009 (AMC 2009) : _bproceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. / _ceditors: Daniel C. Edelstein, Stefan E. Schulz
246	3	0	_aAMC 2009
260			_aWarrendale, Pa. : _bMaterials Research Society, _cc2010
300			_axiii, 295 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society conference proceedings
500			_a"This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p.
504			_aIncludes bibliographical references and indexes
650		0	_aSemiconductors _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses
650		0	_aThin films _vCongresses
650		0	_aMetallic films _vCongresses
650		0	_aMetallizing _vCongresses
700	1		_aEdelstein, Daniel C.
700	1		_aSchulz, Stefan E.
710	2		_aUniversity of California, Berkeley. _bContinuing Education in Engineering
830		0	_aMaterials Research Society conference proceedings
999			_aVIRTUA40 _c38300 _d38306
999			_aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*7000*7001*7100*8300*9992