| 000 | 01187nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000027254 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144542.0 | ||
| 008 | 080430s2008 njua f bi 001 0 eng d | ||
| 010 | _a2007-017041 | ||
| 020 | _a9780470083017 (cloth) | ||
| 039 | 9 |
_a201107132011 _bVLOAD _c200908141433 _dVLOAD _c200908141404 _dVLOAD _c200908131749 _dVLOAD _y200804301434 _znorsaini |
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| 040 | _aUMP | ||
| 090 | _aTK7874 .H79 2008 | ||
| 100 | 1 | _aHsu, Tai-Ran. | |
| 245 | 1 | 0 |
_aMEMS and microsystems : _bdesign, manufacture, and packaging / _cTai-Ran Hsu. |
| 250 | _a2nd ed. | ||
| 260 |
_aHoboken, NJ : _bJohn Wiley, _cc2008. |
||
| 300 |
_axxv, 550 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicroelectronic packaging. | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0716/2007017041.html |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html |
| 999 |
_aVIRTUA40 _c38617 _d38623 |
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| 999 | _aVTLSSORT0080*0100*0200*0400*0900*1000*2450*2500*2600*3000*5040*6500*6501*6502*8560*8561*9991 | ||