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| 001 | vtls000026876 | ||
| 003 | KUKTEM | ||
| 005 | 20251117144544.0 | ||
| 008 | 080423s2007 si a f b 001 0 eng d | ||
| 020 | _a9789812709608 (hbk.) | ||
| 020 | _a9812709606 (hbk.) | ||
| 039 | 9 |
_a201108290858 _bFida _c201107132009 _dVLOAD _c201006161144 _dida _c200908141430 _dVLOAD _y200804231402 _znorsaini |
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| 040 | _aUMP | ||
| 090 | _aTK7875 .I58 2007 | ||
| 111 | 2 |
_aInternational Conference on Materials for Advanced Technologies _d(2007 : _cSingapore) |
|
| 245 | 1 | 0 |
_aMEMS technology and devices : _bSuntec, Singapore, 1-6 July 2007 / _cAiqun Liu ... [et al.] |
| 246 | 3 |
_aMEMS technology and devices _h[computer file]: _bSuntec, Singapore, 1-6 July 2007 |
|
| 260 |
_aSingapore : _bPan Stanford Pub. ; _aHackensack, NJ : _bDistributed by World Scientific Pub. Co., _cc2007. |
||
| 300 |
_axv, 441 p. : _bill. ; _c24 cm. + _e1 computer disc |
||
| 500 | _a"ICMAT 2007 conference proceedings"--T.p. verso | ||
| 504 | _aIncludes bibliographical references | ||
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses |
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| 700 | 1 | _aLiu, Aiqun | |
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_aVIRTUA40 _c38699 _d38705 |
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