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008 080423s2007 si a f b 001 0 eng d
020 _a9789812709608 (hbk.)
020 _a9812709606 (hbk.)
039 9 _a201108290858
_bFida
_c201107132009
_dVLOAD
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_dida
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_dVLOAD
_y200804231402
_znorsaini
040 _aUMP
090 _aTK7875 .I58 2007
111 2 _aInternational Conference on Materials for Advanced Technologies
_d(2007 :
_cSingapore)
245 1 0 _aMEMS technology and devices :
_bSuntec, Singapore, 1-6 July 2007 /
_cAiqun Liu ... [et al.]
246 3 _aMEMS technology and devices
_h[computer file]:
_bSuntec, Singapore, 1-6 July 2007
260 _aSingapore :
_bPan Stanford Pub. ;
_aHackensack, NJ :
_bDistributed by World Scientific Pub. Co.,
_cc2007.
300 _axv, 441 p. :
_bill. ;
_c24 cm. +
_e1 computer disc
500 _a"ICMAT 2007 conference proceedings"--T.p. verso
504 _aIncludes bibliographical references
650 0 _aMicroelectromechanical systems
_vCongresses
650 0 _aNanostructured materials
_vCongresses
700 1 _aLiu, Aiqun
999 _aVIRTUA40
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