| 000 | 01314nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000029413 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145131.0 | ||
| 008 | 080611s2007 enka b 001 0 eng | ||
| 020 | _a9780470016992 | ||
| 020 | _a047001699X | ||
| 039 | 9 |
_a201107132024 _bVLOAD _c200908141450 _dVLOAD _c200908141421 _dVLOAD _c200908131759 _dVLOAD _y200806111433 _znorsaini |
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| 040 | _aUMP | ||
| 090 | _aTK7875 .B34 2007 | ||
| 100 | 1 | _aBaglio, S | |
| 245 | 1 | 0 |
_aScaling issues and design of MEMS / _cSalvatore Baglio, Salvatore Castorina, Nicolò Savalli. |
| 246 | 3 | _aScaling issues and design of microelectromechanical systems | |
| 260 |
_aChichester, West Sussex, England ; _aHoboken, NJ : _bJohn Wiley & Sons, _cc2007. |
||
| 300 |
_axiii, 229 p. : _bill. ; _c24 cm. |
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| 500 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
| 700 | 1 | _aCastorina, Salvatore. | |
| 700 | 1 | _aSavalli, Nicol. | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html |
| 999 |
_aVIRTUA40 _c40054 _d40060 |
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