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008 080226t flua bi 001 0 eng d
020 _a082472447X (alk. paper)
039 9 _a201107132027
_bVLOAD
_c200908141455
_dVLOAD
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_znorsaini
040 _aUMP
090 _aTA418.9.T45 E52 2005
245 0 0 _aEngineering thin films and nanostructures with ion beams /
_cedited by Emile Knystautas
246 2 _aEngineering thin films and nanostructures with ion beams
_h[electronic resource]
260 _aBoca Raton, FL :
_bTaylor & Francis,
_cc2005
300 _a574 p. :
_bill. ;
_c24 cm. +
_e1 CD-ROM
490 1 _aOptical engineering ;
_vv.92
504 _aIncludes bibliographical references and index
650 0 _aThin films
650 0 _aNanostructures
650 0 _aIon bombardment
_xIndustrial applications
700 1 _aKnystautas, Emile J.
830 0 _aOptical engineering (Marcel Dekker, Inc.) ;
_vv. 92.
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0648/2004058212-d.html
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