| 000 | 01031nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000030165 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145135.0 | ||
| 008 | 080714t2008 gw da f 001 0 eng d | ||
| 020 | _a9783527314942 | ||
| 020 | _a3527314946 | ||
| 039 | 9 |
_a201107132030 _bVLOAD _c200908141458 _dVLOAD _c200908141429 _dVLOAD _c200908131804 _dVLOAD _y200807141026 _zsaini |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .R45 2008 | ||
| 245 | 0 | 0 |
_aReliability of MEMS : _btesting of materials and devices / _cedited by Osamu Tabata and Toshiyuki Tsuchiya |
| 260 |
_aWeinheim : _bWiley-VCH , _cc2008 |
||
| 300 |
_axx, 303 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aAdvanced micro & nanosystems _vv.6 |
|
| 500 | _a"Testing of materials and devices"-- Cover | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _xReliablity |
|
| 700 | 1 | _aTabata, Osamu | |
| 700 | 1 | _aTsuchiya, Toshiyuki | |
| 999 |
_aVIRTUA40 _c40194 _d40200 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4400*5000*5040*6500*7000*7001*9991 | ||