| 000 | 01181nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062533 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145150.0 | ||
| 008 | 120619t1985 paua f b 001 0 eng d | ||
| 020 | _a9780931837036 | ||
| 020 | _a0931837030 | ||
| 039 | 9 |
_a201304031048 _bjamie _c201304031048 _djamie _y201206191609 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTA2005 .P53 1985 | ||
| 245 | 0 | 0 |
_aPlasma synthesis and etching of electronic materials : _bsymposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / _ceditors by R. P. H. Chang, B. Abeles |
| 260 |
_aPittsburgh, PA : _bMaterials Research Society, _cc1985 |
||
| 300 |
_axv, 522 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposia proceedings ; _vv. 38 |
|
| 504 | _aIncludes bibliographies references and index | ||
| 650 | 0 |
_aPlasma engineering _xCongresses |
|
| 650 | 0 |
_aPlasma etching _xCongresses |
|
| 650 | 0 |
_aElectronics _xMaterials _xCongresses |
|
| 700 | 1 | _aChang, R. P. H. | |
| 700 | 1 | _aAbeles, B. | |
| 830 | 0 | _aMaterials Research Society symposia proceedings | |
| 999 |
_aVIRTUA40 _c40712 _d40718 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*8300*9992 | ||