| 000 | 01201nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062101 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145226.0 | ||
| 008 | 120618t1996 paua f b 001 0 eng d | ||
| 020 | _a9781558993181 | ||
| 020 | _a1558993185 | ||
| 039 | 9 |
_a201307111425 _bjamie _y201206180954 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.15.C4 M48 1996 | ||
| 245 | 0 | 0 |
_aMetal-organic chemical vapor deposition of electronic ceramics II : _bsymposium held on November 27-29 1995, Boston, Massachusetts, U.S.A. / _ceditors by Seshu B. Desu, David B. Beach, Peter C. van Buskirk |
| 260 |
_aPittsburgh, PA : _bMaterials Research Society, _cc1996 |
||
| 300 |
_axi, 264 p. : _bill. ; _c24 cm. |
||
| 490 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 415 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aElectronic ceramics _vCongresses |
|
| 650 | 0 |
_aMetal organic chemical vapor deposition _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 700 | 1 | _aDesu, Seshu B. | |
| 700 | 1 | _aBeach, David B. | |
| 700 | 1 | _aVan Buskirk, Peter C. | |
| 999 |
_aVIRTUA40 _c41903 _d41909 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*7002*9992 | ||