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|---|---|---|---|
| 001 | vtls000029279 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145245.0 | ||
| 008 | 080604s2008 njua b 001 0 eng | ||
| 020 | _a0470174471 (cloth) | ||
| 020 | _a9780470174470 (cloth) | ||
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_a201107132058 _bVLOAD _c200908141536 _dVLOAD _c200908141507 _dVLOAD _c200908132039 _dVLOAD _y200806041441 _znorsaini |
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| 040 | _aUMP | ||
| 090 | _aQD506 .I74 2008 | ||
| 100 | 1 | _aIrene, Eugene A. | |
| 245 | 1 | 0 |
_aSurfaces, interfaces, and thin films for microelectronics / _cEugene A. Irene. |
| 260 |
_aHoboken, N.J. : _bWiley-Interscience, _cc2008. |
||
| 300 |
_axiii, 515 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aSurface chemistry. | |
| 650 | 0 | _aInterfaces (Physical sciences) | |
| 650 | 0 | _aThin films. | |
| 650 | 0 |
_aMicroelectronics _xMaterials. |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0720/2007024692.html |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0806/2007024692-b.html |
| 999 |
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