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|---|---|---|---|
| 001 | vtls000029412 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145246.0 | ||
| 008 | 080611s2008 enka b 001 0 eng | ||
| 020 | _a0470058617 (cloth) | ||
| 020 | _a9780470058619 (cloth) | ||
| 039 | 9 |
_a201107132058 _bVLOAD _c200908141537 _dVLOAD _c200908141507 _dVLOAD _c200908132039 _dVLOAD _y200806111432 _znorsaini |
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| 040 | _aUMP | ||
| 090 | _aTK7875 .G46 2008 | ||
| 100 | 1 | _aGerlach, Gerald. | |
| 240 | 1 | 0 |
_aEinführung in die Mikrosystemtechnik. _lEnglish |
| 245 | 1 | 0 |
_aIntroduction to microsystem technology : _ba guide for students / _cGerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller. |
| 260 |
_aChichester, England ; _aHoboken, NJ : _bJ. Wiley & Sons, _cc2008. |
||
| 300 |
_axxiii, 351 p. : _bill. ; _c26 cm. |
||
| 440 | 0 | _aWiley microsystem and nanotechnology series | |
| 504 | _aIncludes bibliographical references and index. | ||
| 546 | _aTranslated from the German. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
| 650 | 0 | _aSystem design. | |
| 650 | 0 | _aMicroelectronics. | |
| 700 | 1 | _aDötzel, Wolfram. | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0806/2007050172-t.html |
| 999 |
_aVIRTUA40 _c42557 _d42563 |
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