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003 KUKTEM
005 20251117145246.0
008 080611s2008 enka b 001 0 eng
020 _a0470058617 (cloth)
020 _a9780470058619 (cloth)
039 9 _a201107132058
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040 _aUMP
090 _aTK7875 .G46 2008
100 1 _aGerlach, Gerald.
240 1 0 _aEinführung in die Mikrosystemtechnik.
_lEnglish
245 1 0 _aIntroduction to microsystem technology :
_ba guide for students /
_cGerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller.
260 _aChichester, England ;
_aHoboken, NJ :
_bJ. Wiley & Sons,
_cc2008.
300 _axxiii, 351 p. :
_bill. ;
_c26 cm.
440 0 _aWiley microsystem and nanotechnology series
504 _aIncludes bibliographical references and index.
546 _aTranslated from the German.
650 0 _aMicroelectromechanical systems
_xDesign and construction.
650 0 _aSystem design.
650 0 _aMicroelectronics.
700 1 _aDötzel, Wolfram.
856 4 1 _3Table of contents only
_uhttp://www.loc.gov/catdir/enhancements/fy0806/2007050172-t.html
999 _aVIRTUA40
_c42557
_d42563
999 _aVTLSSORT0080*0200*0201*0400*0900*1000*2400*2450*2600*3000*4400*5040*5460*6500*6501*6502*7000*8560*9991