| 000 | 01072nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000032284 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145318.0 | ||
| 008 | 081114s2008 njua b 001 0 eng | ||
| 020 | _a9789812568236 | ||
| 020 | _a9812568239 | ||
| 039 | 9 |
_a201107132113 _bVLOAD _c200908141557 _dVLOAD _c200908141529 _dVLOAD _c200908132051 _dVLOAD _y200811140947 _zshah |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .Y66 2008 | ||
| 100 | 1 | _aYoo, Chue San. | |
| 245 | 1 | 0 |
_aSemiconductor manufacturing technology / _cChue San Yoo. |
| 260 |
_aHackensack, N.J. ; _aLondon : _bWorld Scientific, _cc2008. |
||
| 300 |
_axii, 470 p. : _bill. ; _c24 cm. |
||
| 440 | 0 |
_aAdvanced series in electrical and computer engineering ; _vv. 13 |
|
| 500 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 650 | 0 | _aSemiconductor industry. | |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/fy0804/2008299033.html |
| 999 |
_aVIRTUA40 _c43689 _d43695 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*4400*5000*6500*6501*8560*9991 | ||