| 000 | 01182nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000035825 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145339.0 | ||
| 008 | 090430t2009 flua f 001 0 eng d | ||
| 020 | _a9781420043761 | ||
| 039 | 9 |
_a201107132122 _bVLOAD _c200910271609 _dsri _c200908141608 _dVLOAD _c200908141541 _dVLOAD _y200904301507 _znadia |
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| 040 | _aUMP | ||
| 090 | _aTK7871 .F54 2009 | ||
| 100 | 1 | _aFleetwood, Daniel M. | |
| 245 | 1 | 0 |
_aDefects in microelectronic materials and devices / _cedited by Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf |
| 260 |
_aBoca Raton : _bCRC Press, _c2009 |
||
| 300 |
_axvi, 753 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectronics _xMaterials _xTesting |
|
| 650 | 0 |
_aMetal oxide semiconductor field-effect transistors _xTesting |
|
| 650 | 0 |
_aIntegrated circuits _xDefects |
|
| 700 | 1 | _aPantelides, Sokrates T. | |
| 700 | 1 | _aSchrimpf, Ronald Donald. | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0817/2008018722.html |
| 999 |
_aVIRTUA40 _c44378 _d44384 |
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| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*7000*7001*8560*9991 | ||