| 000 | 01023nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | vtls000030138 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145345.0 | ||
| 008 | 080710t2007 xxkda f 100 0 eng d | ||
| 020 | _a9781605600307 | ||
| 039 | 9 |
_a201107132120 _bVLOAD _c200908141606 _dVLOAD _c200908141538 _dVLOAD _c200908132057 _dVLOAD _y200807101610 _znadia |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .I48 2007 | ||
| 111 | 2 |
_aIET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology _d(2007 : _cLondon, UK) |
|
| 245 | 1 | 0 |
_aIET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology 2007, April 25, 2007, London, UK / _cInstitution of Engineering and Technology |
| 246 | 3 | 3 | _aIET seminar digest |
| 260 |
_aStevenage, UK : _bInstitution of Engineering and Technology, _c[2007] |
||
| 300 |
_a67 p. : _bill. ; _c28 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 999 |
_aVIRTUA40 _c44548 _d44554 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1110*2450*2460*2600*3000*5040*6500*9991 | ||