000 01023nam a2200229 a 4500
001 vtls000030138
003 KUKTEM
005 20251117145345.0
008 080710t2007 xxkda f 100 0 eng d
020 _a9781605600307
039 9 _a201107132120
_bVLOAD
_c200908141606
_dVLOAD
_c200908141538
_dVLOAD
_c200908132057
_dVLOAD
_y200807101610
_znadia
040 _aUMP
090 _aTK7875 .I48 2007
111 2 _aIET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology
_d(2007 :
_cLondon, UK)
245 1 0 _aIET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology 2007, April 25, 2007, London, UK /
_cInstitution of Engineering and Technology
246 3 3 _aIET seminar digest
260 _aStevenage, UK :
_bInstitution of Engineering and Technology,
_c[2007]
300 _a67 p. :
_bill. ;
_c28 cm.
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
_vCongresses
999 _aVIRTUA40
_c44548
_d44554
999 _aVTLSSORT0080*0200*0400*0900*1110*2450*2460*2600*3000*5040*6500*9991