| 000 | 00985nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000032330 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145414.0 | ||
| 008 | 081117t2006 gw a f b 001 0 eng d | ||
| 020 | _a3540236740 | ||
| 020 | _a9783540236740 | ||
| 039 | 9 |
_a201107132134 _bVLOAD _c200908141625 _dVLOAD _c200908141558 _dVLOAD _c200908132109 _dVLOAD _y200811171541 _zsaini |
|
| 040 | _aUMP | ||
| 090 | _aTS695.25 .N37 2006 | ||
| 100 | 1 | _aNastasi, Michael Anthony | |
| 245 | 1 | 0 |
_aIon implantation and synthesis of materials / _cM. Nastasi, J.W. Mayer |
| 260 |
_aBerlin ; _aNew York : _bSpringer-Verlag, _cc2006 |
||
| 300 |
_axiii, 263 p. : _bill. ; _c24 cm. |
||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aIon implantation | |
| 700 | 1 | _aMayer, James W. | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0817/2006930120-t.html |
| 999 |
_aVIRTUA40 _c45543 _d45549 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5000*6500*7000*8560*9991 | ||