| 000 | 01228nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060669 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145416.0 | ||
| 008 | 120531t2003 pauda f 001 0 eng d | ||
| 020 | _a9781558997028 | ||
| 020 | _a1558997024 | ||
| 039 | 9 |
_a201304091630 _bhuda _y201205311002 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.99.M44 C56 2003 | ||
| 245 | 0 | 0 |
_aCMOS front-end materials and process technology : _bsymposium held April 22-24, 2003, San Francisco, California, U.S.A. / _ceditors, Tsu-Jae King ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _cc2003 |
||
| 300 |
_axi, 308 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMetal oxide semiconductors _xMaterials _vCongresses |
|
| 650 | 0 |
_aMetal oxide semiconductors, Complementary _xMaterials _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses |
|
| 650 | 0 |
_aGate array circuits _xMaterials _vCongresses |
|
| 650 | 0 |
_aDielectrics _vCongresses |
|
| 700 | 1 | _aKing, Tsu-Jae | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 765 |
|
| 999 |
_aVIRTUA40 _c45601 _d45607 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5040*6500*6501*6502*6503*6504*7000*8300*9992 | ||