| 000 | 00857nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060632 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145430.0 | ||
| 008 | 120530t2012 gw a f 001 0 eng d | ||
| 020 | _a9783527327973 | ||
| 020 | _a3527327975 | ||
| 039 | 9 |
_a201210081620 _basmadi _y201205301602 _zirma |
|
| 040 | _aUMP | ||
| 090 | _aTS695 .A86 2012 | ||
| 245 | 0 | 0 |
_aAtomic layer deposition of nanostructured materials / _cedited by Nicola Pinna, Mato Knez |
| 260 |
_aWeinheim, GER : _bWiley-VCH, _c2012 |
||
| 300 |
_axxxvi, 435 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aChemical vapor deposition | |
| 650 | 0 | _aNanostructured materials | |
| 700 | 1 | _aPinna, Nicola | |
| 700 | 1 | _aKnez, Mato | |
| 999 |
_aVIRTUA40 _c46115 _d46121 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5040*6500*6501*7000*7001*9992 | ||