000 00857nam a2200253 a 4500
001 vtls000060632
003 KUKTEM
005 20251117145430.0
008 120530t2012 gw a f 001 0 eng d
020 _a9783527327973
020 _a3527327975
039 9 _a201210081620
_basmadi
_y201205301602
_zirma
040 _aUMP
090 _aTS695 .A86 2012
245 0 0 _aAtomic layer deposition of nanostructured materials /
_cedited by Nicola Pinna, Mato Knez
260 _aWeinheim, GER :
_bWiley-VCH,
_c2012
300 _axxxvi, 435 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index
650 0 _aChemical vapor deposition
650 0 _aNanostructured materials
700 1 _aPinna, Nicola
700 1 _aKnez, Mato
999 _aVIRTUA40
_c46115
_d46121
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5040*6500*6501*7000*7001*9992