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001 vtls000060579
003 KUKTEM
005 20251117145431.0
008 120529t1990 paudao f 001 0 eng d
020 _a9781558990562
020 _a1558990569
039 9 _a201304101024
_bhuda
_y201205291623
_zsafura
040 _aUMP
090 _aTS695.9 .C44 1990
245 0 0 _aChemical vapor deposition of refractory metals and ceramics :
_bsymposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /
_ceditors, Theodore M. Besmann, Bernard M. Gallois
260 _aPittsburgh, PA :
_bMaterials Research Society,
_cc1990
300 _axiii, 399 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposium proceedings,
_vv. 168
504 _aIncludes bibliographical references and indexes
650 0 _aRefractory coating
_xCongresses
650 0 _aVapor-plating
_xCongresses
700 1 _aBesmann, Theodore M.
700 1 _aGallois, Bernard M.
830 0 _aMaterials Research Society symposia proceedings ;
_vv. 168
999 _aVIRTUA40
_c46151
_d46157
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*7001*8300*9992