| 000 | 01550nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060049 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145441.0 | ||
| 008 | 120522t1996 paua f b 101 0 eng d | ||
| 020 | _a9781558993303 | ||
| 020 | _a1558993304 | ||
| 039 | 9 |
_a201212051147 _bfauzi _y201205221555 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.76 .A383 1996 | ||
| 245 | 0 | 0 |
_aAdvanced metallization for future ULSI : _bsymposium held April 8-11, 1996, San Francisco, California, U.S.A. / _ceditors, K.N. Tu ... [et al.] |
| 260 |
_aPittsburgh, Pa : _bMaterials Research Society , _cc1996 |
||
| 300 |
_axiii, 597 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 427 |
|
| 500 | _aPapers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996 | ||
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aMetallizing _vCongresses |
|
| 650 | 0 |
_aMetallic films _vCongresses |
|
| 650 | 0 |
_aSemiconductors _xDesign and construction _vCongresses |
|
| 700 | 1 | _aTu, K. N. | |
| 710 | 2 |
_aMaterials Research Society. _bMeeting _d(1996 : _cSan Francisco, Calif.) |
|
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv.427 |
|
| 999 |
_aVIRTUA40 _c46515 _d46521 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*5040*6500*6501*6502*6503*7000*7100*8300*9992 | ||