| 000 | 01535nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060092 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145445.0 | ||
| 008 | 120523t2007 paua f 001 0 eng d | ||
| 020 | _a1558999515 | ||
| 020 | _a9781558999510 | ||
| 039 | 9 |
_a201211281204 _basmadi _c201205231008 _dsafura _y201205231006 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .S96 2007 | ||
| 111 | 2 | _aSymposium C, "Advances and Challenges in Chemical Mechanical Planarization" d (2007 : c San Francisco, Calif.) | |
| 245 | 0 | 0 |
_aAdvances and challenges in chemical mechanical planarization : _bsymposium held April 10-12, 2007, San Francisco, California, U.S.A. / _ceditors, Gerfried Zwicker ... [et al.] |
| 260 |
_aWarrendale, PA. : _bMaterials Research Society, _c2007 |
||
| 300 |
_axi, 371 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 991 |
|
| 500 | _a"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref. | ||
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aSemiconductors _xMaterials _vCongresses |
|
| 650 | 0 |
_aSemiconductors _xSurfaces _vCongresses |
|
| 650 | 0 |
_aChemical mechanical planarization _vCongresses |
|
| 700 | 1 | _aZwicker, Gerfried | |
| 830 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 991 |
|
| 999 |
_aVIRTUA40 _c46627 _d46633 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*7000*8300*9992 | ||