| 000 | 01486nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060059 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145449.0 | ||
| 008 | 120522t1990 paua f b 101 0 eng d | ||
| 020 | _a9781558990708 | ||
| 020 | _a1558990704 | ||
| 039 | 9 |
_a201301031459 _bFida _c201212031412 _dfauzi _y201205221608 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874 .A38 1990 | ||
| 245 | 0 | 0 |
_aAdvanced metallizations in microelectronics : _bsymposium held April 16-20, 1990, San Francisco, California, U.S.A. / _ceditors, Avishay Katz, Shyam P. Murarka, Ami Appelbaum |
| 260 |
_aPittsburgh, Pa. : _bMaterials Research Society, _cc1990 |
||
| 300 |
_axv, 633 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings, _x0272-9172 ; _vv. 181 |
|
| 500 | _a"The Symposium on Advanced Metallizations in Microelectronics ... was held as Symposium B of the 1990 Spring Meeting of the Materials Research Society"--Pref. | ||
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectronics _vCongresses |
|
| 650 | 0 |
_aMetallizing _vCongresses |
|
| 700 | 1 | _aKatz, Avishay | |
| 700 | 1 | _aMurarka, S. P. | |
| 700 | 1 | _aAppelbaum, Ami | |
| 711 | 2 |
_aSymposium on Advanced Metallizations in Microelectronics _d(1990 : _cSan Francisco, Calif.) |
|
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 181 |
|
| 999 |
_aVIRTUA40 _c46762 _d46768 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*5040*6500*6501*7000*7001*7002*7110*8300*9992 | ||